A miniature Clark-type oxygen electrode using a polyelectrolyte and its application as a glucose sensor

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

Anisotropic etching of silicon

K.E. Bean · IEEE Transactions on Electron Devices · 1978 · 796 citations

Engineering, Materials Engineering, Materials Science +15

Anisotropic Etching of Silicon

D. B. Lee · Journal of Applied Physics · 1969 · 307 citations

Engineering, Materials Engineering, Materials Science +15

Performance characteristics of a planar ‘clark-type’ oxygen sensor

M. Koudelka · Sensors and Actuators · 1986 · 70 citations

Engineering, Electrical Engineering, Biosensors +6

Fabrication of an oxygen electrode using semiconductor technology

Hiroaki Suzuki, Eiichi Tamiya, Isao Karube · Analytical Chemistry · 1988 · 64 citations

Natural Sciences, Chemistry, Materials Science +10