Varifocal liquid lenses with integrated actuator, high focusing power and low operating voltage fabricated on 200mm wafers

A. Pouydebasque, Claudine Bridoux, F. Jacquet, S. Moreau, Eric Sage, D. Saint-Patrice, Christophe Bouvier, Christophe Kopp, Gilles Marchand, Sébastien Bolis,

Sensors and Actuators A Physical · 2011 · 34 citations · 19 references

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