Structure dependent charging process in RF MEMS capacitive switches

Lifetime characterization of capacitive RF MEMS switches

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Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)

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Detailed study of the composition of hydrogenated SiNx layers for high-quality silicon surface passivation

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Temperature study of the dielectric polarization effects of capacitive RF MEMS switches

G. Papaioannou, M.-N. Exarchos, V. Theonas et al. · IEEE Transactions on Microwave Theory and Techniques · 2005 · 119 citations

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Modeling and characterization of dielectric-charging effects in RF MEMS capacitive switches

Xiaobin Yuan, James C. M. Hwang, David Forehand et al. · IEEE MTT-S International Microwave Symposium Digest, 2005. · 2005 · 114 citations

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