Concepedia

Tribological and optical properties of crystalline and amorphous alumina thin films grown by low-temperature reactive magnetron sputter-deposition

Jinliu Wang, Yuan-Hsin Yu, S. -C. Lee, Yip‐Wah Chung

Surface and Coatings Technology · 2001 · 56 citations · 9 references

DOI

Concepts

References

9

Measurement of Thin Film Mechanical Properties Using Nanoindentation

George M. Pharr, W. C. Oliver · MRS Bulletin · 1992 · 999 citations

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Structural and electron diffraction data for sapphire (α‐al<sub>2</sub>o<sub>3</sub>)

William Lee, K.P.D. Lagerlöf · Journal of Electron Microscopy Technique · 1985 · 234 citations

, , +17

Use of an externally applied axial magnetic field to control ion/neutral flux ratios incident at the substrate during magnetron sputter deposition

I. Petrov, F. Adibi, J. E. Greene et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 193 citations

, , +13

Crystalline alumina deposited at low temperatures by ionized magnetron sputtering

Jochen M. Schneider, William D. Sproul, Andrey A. Voevodin et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 128 citations

, , +17

Phase transformation in chemically vapour-deposited κ-alumina

S. Vuorinen, Leif Karlsson · Thin Solid Films · 1992 · 105 citations

, , +14