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Microfabrication-based nanomechanical laboratory for testing the ductility of submicron aluminium films

Materials ScienceEngineeringSevere Plastic DeformationMicromechanicsMicrofabricationMechanical EngineeringApplied PhysicsMicrofabrication-based Nanomechanical LaboratorySubmicron Aluminium FilmsMicrostructure-strength RelationshipThin FilmsNanotribologyNanomechanicsMechanics Of MaterialsMicrostructure