Applied Physics A · 2004 · 46 citations · 15 references
Natural SciencesMaterials EngineeringMaterials ScienceSemiconductor DevicesSurface ScienceThin FilmsEpitaxial GrowthEtching ProcessesThin Film EtchingEtch MechanismsEtch RateEtch Rate ModelingRelease Layer Engineering
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Extreme selectivity in the lift-off of epitaxial GaAs films
Eli Yablonovitch, T.J. Gmitter, J. P. Harbison et al. · Applied Physics Letters · 1987 · 806 citations · Full text
High rate epitaxial lift-off of InGaP films from GaAs substrates
J.J. Schermer, G.J. Bauhuis, P. Mulder et al. · Applied Physics Letters · 2000 · 83 citations · Full text