Surface and Coatings Technology · 2000 · 58 citations · 19 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsMoisture-resistant MaterialsNanostructured Electronic MaterialsSemiconductor Thin FilmsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsMagnetron SputteringSemiconductor Oxide Thin FilmsSputter DepositionSputtering TechniquesThin Oxide Layers
19