Materials science forum · 1989 · 188 citations · 0 references
Natural SciencesChemistryMaterials ScienceElectronic MaterialsSemiconductor MaterialsSpectroscopyDefect CharacterizationDefectsDefects In Electronic MaterialsSemiconductor DefectsSemiconductor PhysicsSilicon MaterialsDeep-level DefectsElectrical PropertiesElectron Beam Irradiation EffectsImpurity DefectsReactivitySilicon DefectsSilicon Electrical PropertiesSilicon Impurities