Modeling of dielectric charging in electrostatic MEMS switches - Concepedia

Concepedia

Publication | Closed Access

Modeling of dielectric charging in electrostatic MEMS switches

12

Citations

10

References

2010

Year

Adam Koszewski, F. Souchon, Ch. Dieppedale, T. Ouisse

Microelectronics Reliability

Device ModelingElectrical EngineeringEngineeringMicroelectronicsMicro-electromechanical SystemElectrical InsulationElectrostatic Mems Switches

References

	Year	Citations

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