Effect of the thermal annealing on the electrical and physical properties of SiC thin films produced by RF magnetron sputtering

A semiautomatic algorithm for rutherford backscattering analysis

Lawrence Doolittle · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1986 · 1K citations

Natural Sciences, Earth Sciences, Physics +8

Annealing and crystallization processes in tetrahedrally bonded binary amorphous semiconductors

Akiharu Morimoto, Toyotaka Kataoka, Minoru Kumeda et al. · Philosophical Magazine B · 1984 · 85 citations

Natural Sciences, Materials Engineering, Materials Science +17

Characterization of ultra-hard silicon carbide coatings deposited by RF magnetron sputtering

A.K Costa, S.S. Camargo, Carlos A. Achete et al. · Thin Solid Films · 2000 · 76 citations

Natural Sciences, Materials Engineering, Materials Science +12

Investigation and characterisation of silicon nitride and silicon carbide thin films

Martina Lattemann, E. Nold, S. Ulrich et al. · Surface and Coatings Technology · 2003 · 71 citations

Natural Sciences, Materials Engineering, Materials Science +14

Amorphous SiC coatings for WC cutting tools

A.K Costa, S.S. Camargo · Surface and Coatings Technology · 2002 · 52 citations

Engineering, Materials Engineering, Materials Science +10