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Effect of the thermal annealing on the electrical and physical properties of SiC thin films produced by RF magnetron sputtering

DOI

47

Citations

13

References

2006

Year

Sinan E. Rajab, I. C. Oliveira, M. Massi, Homero Santiago Maciel, Sebastião Gomes dos Santos Filho, Ronaldo Domingues Mansano
Thin Solid Films

References

YearCitations

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