Characterization of ultra-hard silicon carbide coatings deposited by RF magnetron sputtering

Stress reduction and bond stability during thermal annealing of tetrahedral amorphous carbon

Andrea C. Ferrari, B. Kleinsorge, N. A. Morrison et al. · Journal of Applied Physics · 1999 · 431 citations

Natural Sciences, Materials Engineering, Materials Science +17

Dependence of thin-film microstructure on deposition rate by means of a computer simulation

Karl‐Heinz Müller · Journal of Applied Physics · 1985 · 199 citations

Natural Sciences, Materials Engineering, Materials Science +15

Direct evidence for homonuclear bonds in amorphous SiC

M. N. Gorman, S. A. Solin · Solid State Communications · 1974 · 100 citations

Natural Sciences, Materials Science, Physics +14

Annealing and crystallization processes in tetrahedrally bonded binary amorphous semiconductors

Akiharu Morimoto, Toyotaka Kataoka, Minoru Kumeda et al. · Philosophical Magazine B · 1984 · 85 citations

Natural Sciences, Materials Engineering, Materials Science +17

Spectroscopic characterization of thermally treated carbon-rich Si1−xCx films

N. Laidani, R. Capelletti, M. Elena et al. · Thin Solid Films · 1993 · 72 citations

Natural Sciences, Materials Engineering, Materials Science +12