Concepedia

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Ion implantation in Si/Si1−xGex epitaxial layers and superlattices

DOI

17

Citations

7

References

1989

Year

S. Mantl, B. Holländer, W. Jäger, B. Kabius, H. Jorke, E. Kasper
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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