Surface modification of silicate glasses by nanoimprint using nanostriped NiO thin film molds

Imprint of sub-25 nm vias and trenches in polymers

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Applied Physics Letters · 1995 · 2.7K citations

Engineering, Manufacturing Engineering, Materials Science +15

Imprint Lithography with 25-Nanometer Resolution

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Science · 1996 · 2.3K citations

Engineering, Electrical Engineering, Manufacturing Engineering +14

Sub-10 nm imprint lithography and applications

Stephen Y. Chou, Peter R. Krauss, Wei Zhang et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 1.1K citations

Engineering, Electrical Engineering, Materials Science +14

Atomic-scale formation of ultrasmooth surfaces on sapphire substrates for high-quality thin-film fabrication

Mamoru Yoshimoto, Tatsuro Maeda, Tsuyoshi Ohnishi et al. · Applied Physics Letters · 1995 · 399 citations

Natural Sciences, Materials Science, Physics +17

Nanostructured materials prepared by use of ordered porous alumina membranes

Yuanzhe Piao, Hyun‐Chang Lim, Ji Young Chang et al. · Electrochimica Acta · 2005 · 132 citations

Engineering, Materials Engineering, Materials Science +12