Concepedia

Temperature dependence of ejection patterns in Ge, Si, InSb, and InAs sputtering

G. S. Anderson, G. K. Wehner

Surface Science · 1964 · 44 citations · 6 references

DOI

Concepts

References

6

Sputtering Yields at Very Low Bombarding Ion Energies

R. V. Stuart, G. K. Wehner · Journal of Applied Physics · 1962 · 306 citations

, , +12

Radiation damage in solids

M. A. Pomerantz · Journal of the Franklin Institute · 1961 · 233 citations

, , +12

Sputtering of Dielectrics by High-Frequency Fields

G. S. Anderson, W. Mayer, G. K. Wehner · Journal of Applied Physics · 1962 · 129 citations

, , +16

Atom Ejection Patterns in Single-Crystal Sputtering

G. S. Anderson, G. K. Wehner · Journal of Applied Physics · 1960 · 65 citations

, , +14

Atom Ejection in Low Energy Sputtering of Single Crystals of fcc Metals and of Ge and Si

G. S. Anderson · Journal of Applied Physics · 1962 · 33 citations

, , +10