Concepedia

A graphical analysis of transient response curves at an early stage in SIMS depth profiling using a 133Cs+ beam

Hitoshi Tomizuka, Akimi Ayame

Applied Surface Science · 1995 · 14 citations · 10 references

DOI

Concepts

References

10

Properties of oxidized silicon as determined by angular-dependent X-ray photoelectron spectroscopy

Jeffrey Hill, D. G. Royce, C. S. Fadley et al. · Chemical Physics Letters · 1976 · 275 citations

, , +14

Mechanism of the SIMS matrix effect

V. R. Deline, W. Katz, C. A. Evans et al. · Applied Physics Letters · 1978 · 233 citations

, , +10

Secondary ion mass spectrometry (SIMS VI)

A. Benninghoven, Andreas Huber, H. W. Werner · Analytica Chimica Acta · 1988 · 211 citations

, , +6

SiSiO2 interface characterization by ESCA

Akitoshi Ishizaka, Seiichi Iwata, Yoshiaki Kamigaki · Surface Science · 1979 · 175 citations

, , +7

A unified explanation for secondary ion yields

V. R. Deline, C. A. Evans, Peter Williams · Applied Physics Letters · 1978 · 112 citations

, , +14