Applied Surface Science · 2002 · 39 citations · 17 references
EngineeringMechanical EngineeringPhysicsMicroelectromechanical SystemsSensorsVibrationAtomic Force MicroscopyForce SensingMechanical SensorsPiezoelectric ActuationPiezoelectric ActuatorsScanning Probe MicroscopyBeam OscillationCantilever Deflection DetectionCantilever MechanicsDeflection MeasurementNoncontact Atomic Force MicroscopyOscillation Theory
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Atomic Resolution of the Silicon (111)-(7×7) Surface by Atomic Force Microscopy
Franz J. Gießibl · Science · 1995 · 1.2K citations · Full text