Applied Physics A · 2009 · 17 citations · 12 references
EngineeringMaterials EngineeringMaterials ScienceManufacturing ProcessesMaterials ProcessingMicrofabricationEtching ProcessesLaser CuttingLaser Material ProcessingMicrofabrication ProcessesSilicon MaterialsSubstrate PreparationChemical ProcessingLaser MicromachiningSiliconSilicon Wafer ProcessingSubstrate Cutting
12
Kr Iler · Medical Entomology and Zoology · 1979 · 5K citations
Laser ablation of solid substrates in water and ambient air
Sha Zhu, Yongfeng Lu, Minghui Hong et al. · Journal of Applied Physics · 2001 · 191 citations
Natural Sciences, Physics, Acoustics +14