Publication | Closed Access

Study of mechanical properties of RF MEMS switches by nanoindentation: characterization and modeling of electro-mechanical behavior

Materials ScienceElectrical EngineeringElectro-mechanical BehaviorEngineeringMechanical PropertiesMicrofabricationNanoelectronicsNanotechnologyMechanical EngineeringNano Electro Mechanical SystemMicroelectromechanical SystemsMicroactuatorElectronic PackagingMicroelectronicsRf Mems SwitchesNanomechanicsMicro-electromechanical System