Study of mechanical properties of RF MEMS switches by nanoindentation: characterization and modeling of electro-mechanical behavior

Improved analysis of microbeams under mechanical and electrostatic loads

Bumkyoo Choi, Edward G. Lovell · Journal of Micromechanics and Microengineering · 1997 · 105 citations

Engineering, Mechanical Engineering, Computational Structural Analysis +16

Electromechanical model of RF MEMS switches

L. X. Zhang, Ya‐Pu Zhao · Microsystem Technologies · 2003 · 103 citations

Engineering, Electrical Engineering, Physics +14

Pull-in voltage study of electrostatically actuated fixed-fixed beams using a VLSI on-chip interconnect capacitance model

Sazzadur Chowdhury, Majid Ahmadi, William C. Miller · Journal of Microelectromechanical Systems · 2006 · 56 citations

Engineering, Computer Engineering, Electrical Engineering +17

A DC to 100 GHz high performance ohmic shunt switch

Denis Mercier, P.L. Charvet, P. Berruyer et al. · 2004 · 46 citations

Engineering, Electrical Engineering, Microelectronics +16

Modeling, Simulation, and Testing of the Mechanical Dynamics of an RF MEMS Switch

Jordan E. Massad, Hartono Sumali, David S. Epp et al. · 2006 · 28 citations

Engineering, Electrical Engineering, Mechanical Engineering +17