Improvement of high-temperature oxidation resistance of titanium nitride and titanium carbide films by aluminum ion implantation

Titanium aluminum nitride films: A new alternative to TiN coatings

Wolf‐Dieter Münz · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 947 citations

Natural Sciences, Materials Engineering, Materials Science +17

On structure and properties of sputtered Ti and Al based hard compound films

O. Knotek, M. Böhmer, T. Leyendecker · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 397 citations

Natural Sciences, Materials Engineering, Materials Science +17

Phase formation and characterization of hard coatings in the TiAlN system prepared by the cathodic arc ion plating method

Tsutomu Ikeda, Hiroshi Satoh · Thin Solid Films · 1991 · 304 citations

Engineering, Materials Engineering, Materials Science +17

Oxidation kinetics of TiN thin films

M. Wittmer, J. R. Noser, H. Melchior · Journal of Applied Physics · 1981 · 286 citations

Natural Sciences, Materials Engineering, Materials Science +17

High-temperature oxidation of ion-plated TiN and TiAlN films

Hiroshi Ichimura, Atsuo Kawana · Journal of materials research/Pratt's guide to venture capital sources · 1993 · 189 citations

Natural Sciences, Materials Engineering, Materials Science +16