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Improvement of high-temperature oxidation resistance of titanium nitride and titanium carbide films by aluminum ion implantation

Materials ScienceMaterials EngineeringElectrical EngineeringAluminum Ion ImplantationHigh-temperature Oxidation ResistanceEngineeringIon ImplantationCorrosionOxidation ResistanceAlloy DesignTitanium NitrideCarbide