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Resonant cantilever sensors operated in a high-Q in-plane mode for real-time bio/chemical detection in liquids

Sensor ApplicationEngineeringSensorsMicrofabricationChemical SensorsBioelectronicsAnalytical MicrosystemsHigh-q In-plane ModeResonant Cantilever SensorsSensor DesignBiomedical EngineeringInstrumentationReal-time Bio/chemical DetectionMicrofluidicsSensor Technology