Publication | Closed Access
Dislocations as a source of micropipe development in the growth of silicon carbide
11
Citations
5
References
2001
Year
EngineeringSevere Plastic DeformationMechanical EngineeringSilicon CarbideStable Hollow CoreHollow Dislocation CoreMicrostructure-strength RelationshipMicropipe DevelopmentMaterials EngineeringMaterials ScienceCrystalline DefectsSolid MechanicsSemiconductor Device FabricationDefect FormationMicroelectronicsMicrostructureDislocation InteractionMicrofabricationApplied PhysicsMechanics Of MaterialsCarbide
Micropipes are the primary macroscopic defects in silicon carbide single crystals. It is shown that a stable hollow core of dislocation can act as an initial site of micropipe development. The specific strain energy necessary to estimate the thermodynamic stability of a hollow dislocation core is expressed in terms of the macroscopic parameters of the material Young’s modulus and of the Gruneisen constant.
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