Modification of (111) and (100) silicon in atmospheric pressure plasma

Thermal Conductivity of Silicon and Germanium from 3°K to the Melting Point

C. J. Glassbrenner, Glen A. Slack · Physical Review · 1964 · 1.6K citations

Engineering, Materials Science, Heat Transfer +16

Precise determination of lattice parameter and thermal expansion coefficient of silicon between 300 and 1500 K

Yasumasa Okada, Yozo Tokumaru · Journal of Applied Physics · 1984 · 1.2K citations

Natural Sciences, Materials Engineering, Materials Science +17

Thermal expansion of AlN, sapphire, and silicon

Woosoon Yim, R. J. Paff · Journal of Applied Physics · 1974 · 584 citations

Natural Sciences, Materials Engineering, Materials Science +17

Methods for the calculation of surface free energy of solids

M. Żenkiewicz · Journal of Achievements of Materials and Manufacturing Engineering · 2007 · 374 citations

Natural Sciences, Materials Engineering, Materials Science +17

Low-temperature reactive ion etching and microwave plasma etching of silicon

S. Tachi, Kazunori Tsujimoto, Sadayuki Okudaira · Applied Physics Letters · 1988 · 333 citations

Engineering, Materials Engineering, Materials Science +16