Concepedia

Optical and structural properties of low-temperature PECVD ETMS SiOx thin films

Yizhou Song, Takeshi Sakurai, Koichi Kishimoto, Kazuhiko Maruta, Shigeharu Matsumoto, Kazuo Kikuchi

Thin Solid Films · 1998 · 18 citations · 15 references

DOI

Concepts

References

15

Optical properties of thin films

D. E. Aspnes · Thin Solid Films · 1982 · 1.6K citations

, , +14

Infrared spectroscopic study of SiO<i>x</i> films produced by plasma enhanced chemical vapor deposition

P. G. Pai, S. S. Chao, Yasuo Takagi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 799 citations

, , +17

Local-field effects and effective-medium theory: A microscopic perspective

D. E. Aspnes · American Journal of Physics · 1982 · 763 citations

, , +13

Studies of atomic oxygen in O2+CF4 rf discharges by two-photon laser-induced fluorescence and optical emission spectroscopy

R. E. Walkup, K. L. Saenger, Gary S. Selwyn · The Journal of Chemical Physics · 1986 · 277 citations

, , +16

Investigation of SiO2 plasma enhanced chemical vapor deposition through tetraethoxysilane using attenuated total reflection Fourier transform infrared spectroscopy

Shashank C. Deshmukh, Eray S. Aydil · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 131 citations

, , +17