Concepedia

Publication | Closed Access

Proximity gettering of transition metals in silicon by ion implantation

DOI

31

Citations

7

References

1995

Year

M.H.F. Overwijk, J. Politiek, R.C.M. de Kruif, P. C. Zalm
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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