Characterization of rf-sputtered indium tin oxide thin films

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Semiconducting transparent thin films: their properties and applications

A. L. Dawar, J. C. Joshi · Journal of Materials Science · 1984 · 392 citations

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Electrical and Structural Properties of Tin-Doped Indium Oxide Films Deposited by DC Sputtering at Room Temperature

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Natural Sciences, Materials Science, Physics +17