Gallium distribution and electrical activation in Ga+-implanted Si - Concepedia

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Gallium distribution and electrical activation in Ga+-implanted Si

23

Citations

22

References

1979

Year

M. Y. Tsai, B. G. Streetman, V. R. Deline, C. A. Evans

Journal of Electronic Materials

Electrical EngineeringIon ImplantationEngineeringApplied PhysicsGallium OxideGallium DistributionOptoelectronics

References

	Year	Citations

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