Atomic layer deposition of Cr2O3 thin films: Effect of crystallization on growth and properties - Concepedia

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Atomic layer deposition of Cr2O3 thin films: Effect of crystallization on growth and properties

34

Citations

26

References

2008

Year

Aivar Tarre, Jaan Aarik, Hugo Mändar, Ahti Niilisk, Rainer Pärna, Raul Rammula, Teet Uustare, A. Rosental, Väino Sammelselg

Applied Surface Science

Materials ScienceEngineeringCr2o3 Thin FilmsSurface ScienceApplied PhysicsThin FilmsChemical DepositionEpitaxial GrowthChemical Vapor DepositionAtomic Layer DepositionThin Film Processing

References

	Year	Citations

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