Concepedia

Effect of the radio-frequency power on the dielectric properties of hydrogen-containing boron carbon nitride films deposited by plasma-assisted chemical vapor deposition using tris(dimethylamino)boron gas

Hidemitsu Aoki, Takuro Masuzumi, Makoto Hara, Daisuke Watanabe, Chiharu Kimura, Takashi Sugino

Thin Solid Films · 2009 · 13 citations · 10 references

DOI

Concepts

References

10

Direct-bandgap properties and evidence for ultraviolet lasing of hexagonal boron nitride single crystal

Kenji Watanabe, Takashi Taniguchi, H. Kanda · Nature Materials · 2004 · 3K citations

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Ultralow-k dielectrics prepared by plasma-enhanced chemical vapor deposition

A. Grill, V. Patel · Applied Physics Letters · 2001 · 232 citations

, , +17

Boron carbon nitride film with low dielectric constant as passivation film for high speed electronic devices

Shuichi Umeda, Tadao Yuki, Tomohiko Sugiyama et al. · Diamond and Related Materials · 2004 · 48 citations

, , +16

Electron affinity and field emission characteristics of boron carbon nitride film

Chiharu Kimura, Kunitaka Okada, Shingo Funakawa et al. · Diamond and Related Materials · 2005 · 36 citations

, , +12

Effect of annealing on dielectric constant of boron carbon nitride films synthesized by plasma-assisted chemical vapor deposition

Tomohiko Sugiyama, Tomoyoshi Tai, Takashi Sugino · Applied Physics Letters · 2002 · 34 citations

, , +17