Journal of Micro/Nanolithography MEMS and MOEMS · 2009 · 36 citations · 3 references
EngineeringMicroscopyOptic DesignMechanical EngineeringMicroelectromechanical SystemsMicromanufacturingBiomedical EngineeringIntegrated CircuitsMicroactuatorMicro-electromechanical SystemDeformable MirrorMicromachinesHigh-contrast ImagingGraded-reflectivity MirrorsPolysilicon Surface4096-Element Microelectromechanical SystemsElectrical EngineeringMedical ImagingMechanical DesignMicropositioningMicroelectronicsMicrofabricationBiomedical ImagingMedicineDiffractive Optic
We present the progress in the development of a 4096-element microelectromechanical systems (MEMS) deformable mirror, fabricated using polysilicon surface micromachining manufacturing processes, with 4 µm of stroke, a surface finish of <10 nm rms, a fill factor of 99.5%, and a bandwidth of >5 kHz. The packaging and high-speed drive electronics for this device, capable of frame rates of 22 kHz, are also presented.
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