Generation processes of super-high-energy atoms and ions in magnetron sputtering plasma - Concepedia

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Generation processes of super-high-energy atoms and ions in magnetron sputtering plasma

46

Citations

6

References

2005

Year

Yusuke Takagi, Yohei Sakashita, Hirotaka Toyoda, H. Sugai

EngineeringPhysicsApplied PhysicsAtomic PhysicsPlasma PhysicsIon BeamMagnetron Sputtering PlasmaIon EmissionPlasma ApplicationSuper-high-energy AtomsGeneration Processes

References

	Year	Citations

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