Applied Physics Letters · 1979 · 274 citations · 5 references
EngineeringNuclear EngineeringPhysicsInstrumentationNuclear InstrumentationRadiation DetectionAccelerator PhysicsDetector SystemsDetector TechnologyHeavy-ion PhysicsRadiation Detection PrinciplesRadiation DetectorsAcceleratorsBackscatteringBeam InstrumentationDetector ConstructionElastic RecoilEnergy AnalysisHeavy-ion AcceleratorsNear-surface Characterization
We describe an elastic recoil detection (ERD) analysis technique for profiling 1H in the near-surface regions of solids using a 2.5-MeV Van de Graaff accelerator commonly used for ion-backscattering analysis. Energy analysis of 1H forward scattered by 2.4-MeV 4He incident on the target tilted at an angle of ∼75° yields a depth resolution of ≲700 Å and a sensitivity of better than 0.1 at.% for 1H to depths of ≲0.6 μm in solids.
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Hydrogen implantation in silicon between 1.5 and 60 kev
E. Ligeon, A. Guivarc’h · Radiation Effects · 1976 · 101 citations