Metallurgical aspects of the formation of silicides

Thin Films—Interdiffusion and Reactions

J. M. Poate, K. N. Tu, Jean-Claude Mayor et al. · Journal of The Electrochemical Society · 1979 · 1.7K citations

Natural Sciences, Materials Engineering, Materials Science +12

First phase nucleation in silicon–transition-metal planar interfaces

R. M. Walser, R. W. Bené · Applied Physics Letters · 1976 · 503 citations

Natural Sciences, Materials Engineering, Materials Science +17

Ohmic contacts to semiconductors

D.W. Satchell · Thin Solid Films · 1970 · 156 citations

Engineering, Electrical Engineering, Materials Science +12

Pt2Si and PtSi formation with high-purity Pt thin films

C. Canali, C. Catellani, M. Prudenziati et al. · Applied Physics Letters · 1977 · 115 citations

Natural Sciences, Materials Engineering, Materials Science +17

Refractory metal silicides: Thin-film properties and processing technology

T. Paul Chow, A. J. Steckl · IEEE Transactions on Electron Devices · 1983 · 113 citations

Engineering, Electrical Engineering, Materials Science +17