Publication | Closed Access
The effects of nanoscaled amorphous Si and SiN protective layers on the atomic oxygen resistant and tribological properties of Ag film
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Citations
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References
2012
Year
Materials ScienceEngineeringAg FilmNanotechnologySurface ScienceApplied PhysicsAtomic Oxygen ResistantAmorphous SolidNanoscaled Amorphous SiChemical Vapor DepositionThin Film Processing
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