A new kinematics for ultra precision grinding of conical surfaces using a rotary table and a cup wheel

Ultra-precision grinding

E. Brinksmeier, Yildirim Mutlugünes, Fritz Klocke et al. · CIRP Annals · 2010 · 537 citations

Grinding technology-theory and applications of machining with abrasives

W.B. Rowe · Tribology International · 1990 · 419 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +5

Abrasive Machining of Silicon

Hans Kurt Tönshoff, W. Von Schmieden, Ichiro INASAKI et al. · CIRP Annals · 1990 · 187 citations

Engineering, Manufacturing Engineering, Materials Engineering +11

Grinding induced subsurface cracks in silicon wafers

Zhijian Pei, S.R. Billingsley, Seiji Miura · International Journal of Machine Tools and Manufacture · 1999 · 168 citations

Engineering, Materials Engineering, Materials Science +14

Fine grinding of silicon wafers

Zhijian Pei, Alan Strasbaugh · International Journal of Machine Tools and Manufacture · 2001 · 116 citations

Engineering, Manufacturing Engineering, Materials Science +13