Concepedia

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Thermal degradation of TiSi2/poly-Si gate electrodes

DOI

18

Citations

10

References

1989

Year

S. Nygren, Mikael Östling, C. S. Petersson, H. Norström, Karl-Henrik Ryden, R. Buchta, C. Chatfield
Thin Solid Films

References

YearCitations

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