Publication | Closed Access

Silicon implantation in semi-insulating bulk InP; Electrical and photoluminescence measurements

Electrical EngineeringIon ImplantationEngineeringPhysicsApplied PhysicsSemiconductor MaterialSemiconductor Device FabricationSilicon ImplantationSilicon On InsulatorMicroelectronicsOptoelectronicsElectrical Insulation