High-speed epitaxial growth of AlN above by hydride vapor phase epitaxy

Growth of thick AlN layers by hydride vapor-phase epitaxy

Yoshinao Kumagai, T. Yamane, Akinori Koukitu · Journal of Crystal Growth · 2005 · 89 citations

Natural Sciences, Materials Engineering, Materials Science +14

Thermodynamic Analysis of Hydride Vapor Phase Epitaxy of GaN

Akinori Koukitu, Shin-ichi Hama Shin-ichi Hama, Tetsuya Taki et al. · Japanese Journal of Applied Physics · 1998 · 79 citations

Engineering, Materials Engineering, Materials Science +15

Hydride vapor phase epitaxy of AlN: thermodynamic analysis of aluminum source and its application to growth

Yoshinao Kumagai, T. Yamane, Toshihiko Miyaji et al. · Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics · 2003 · 72 citations

Natural Sciences, Materials Engineering, Materials Science +17

Thermodynamics on hydride vapor phase epitaxy of AlN using AlCl₃ and NH₃

Yoshinao Kumagai, Kikurou Takemoto, Jun Kikuchi et al. · physica status solidi (b) · 2006 · 20 citations

Natural Sciences, Materials Engineering, Materials Science +12