Monolithic integration of MEMS-based phase shifters and optical waveguides in silicon-on-insulator

Abstract

A demonstration of how to monolithically combine silicon waveguides with MEMS-based phase shifters in a single SOI chip is presented. A folded Mach-Zehnder interferometer switch has been designed and tested. The phase shifters have negligible power consumption and a switching time of 150 µs.