Publication | Closed Access
The influence of the annealing conditions on the photoluminescence of ion-implanted SiO2:Si nanosystem at additional phosphorus implantation
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Citations
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References
2003
Year
Materials ScienceAdditional Phosphorus ImplantationIon ImplantationPhotoluminescenceEngineeringNanotechnologyApplied PhysicsSi NanosystemIon-implanted Sio2PhosphoreneSilicon On InsulatorOptoelectronics
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