Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 22 citations · 23 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationNanomaterialsNanotechnologyAlloysCarbon NanomaterialsCarbon-carbon CompositesComposite MaterialsNanocompositesNanomaterial CharacterizationCarbon-based NanomaterialsElectron Energy LossElectron Energy-loss SpectroscopyFilm MicrostructureMicrostructureNanocomposite FilmsNanoindentationPulsed Laser Deposition
Diamondlike carbon–silver and diamondlike carbon–titanium nanocomposite films with thicknesses greater than one μm were deposited on Ti–6Al–4V alloy substrates using a multicomponent pulsed laser deposition process. Z-contrast scanning transmission electron microscopy (STEM-Z) and electron energy loss spectroscopy (EELS) were used to determine film microstructure and carbon bonding, respectively. Self-assembled silver nanodot arrays were observed in the diamondlike carbon–silver films, and alternating titanium carbide/diamondlike carbon nanolayers were observed in the diamondlike carbon–titanium films. Scratch testing demonstrated good adhesion of diamondlike carbon–metal nanocomposite films to the Ti–6Al–4V alloy. Nanoindentation testing of the diamondlike carbon-metal films demonstrated excellent hardness and modulus values, within the range of 35GPa and 350GPa, respectively. Diamondlike carbon-metal composite films have numerous potential applications, including use in machine tools, medical prostheses, and electronic devices.
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