Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 80 citations · 4 references
Natural SciencesMaterials EngineeringMaterials ScienceNanomaterialsNanotechnologyThin FilmsAlloysGrain Structure FormationMetal Oxide NanomaterialsMetalsNanoscale MaterialsThin-film DepositionCopper Oxide NanostructuresField EmissionGranule Size AnalysisGranule Size EffectsLaser AblationMetal NanoparticlesNanocrystalline Thin FilmsThin Oxide Films
A new method is proposed for the fabrication of thin films consisting of closely packed nm-size metallic grains. The method is based on laser ablation of metallic (Cu) target and cascade fission of ejected liquid metallic drops charged in the laser torch plasma. It is suggested that cascade fission is limited by field emission current from the drop surface, which stops this process sharply when the Cu granule size diminishes down to about 10 nm. The fabricated films, free oxidized in air, are shown to consist of one or several layers of monodisperse spherical Cu grains, 8 nm in diameter, covered by about a 1 nm thick Cu2O layer.
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