Refractive index control of core layer using PECVD and FHD for silica optical waveguide

Very low-loss GeO ₂ -doped silica waveguides fabricated by flame hydrolysis deposition method

T. Kominato, Y. Ohmori, H. Okazaki et al. · Electronics Letters · 1990 · 91 citations

Engineering, Materials Engineering, Materials Science +13

Effects of process parameters on the growth of thick SiO2 using plasma enhanced chemical vapor deposition with hexamethyldisilazane

Jin-Kyung Choi, Do‐Heyoung Kim, J. Lee et al. · Surface and Coatings Technology · 2000 · 32 citations

Natural Sciences, Materials Engineering, Materials Science +12

Planar optical waveguide thin films grown by microwave ECR PECVD

Jinsong Zhang, Rongqing Liang, Yifeng Sui et al. · Surface and Coatings Technology · 2000 · 18 citations

Engineering, Electrical Engineering, Physics +14

Vitreous silica processing by vapor phase deposition for optical fiber preform

Carlos K. Suzuki, Delson Torikai · Radiation effects and defects in solids · 1998 · 11 citations

Engineering, Materials Engineering, Materials Science +15