Publication | Closed Access
Low threading dislocation Ge on Si by combining deposition and etching
42
Citations
18
References
2011
Year
Materials EngineeringMaterials ScienceEngineeringDislocation GeDislocation InteractionMicrofabricationApplied PhysicsSemiconductor Device FabricationElectronic PackagingSilicon On InsulatorMicroelectronicsPlasma EtchingChemical Vapor DepositionMicrostructure
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