Investigation of substrate bias effects on the reactively sputtered ZrN diffusion barrier films

X-ray diffraction procedures

Harold P. Klug, Leroy Alexander · CERN Document Server (European Organization for Nuclear Research) · 1954 · 4.2K citations

Reactive-sputter-deposited TiN films on glass substrates

Joshua Pelleg, Levy Zevin, S. Lungo et al. · Thin Solid Films · 1991 · 744 citations

Natural Sciences, Materials Engineering, Materials Science +14

Binary phase diagrams

Alan F. Berndt · Journal of Chemical Education · 1969 · 432 citations

Management, Educational Assessment, Mass Communication +6

Effects of strain energy on the preferred orientation of TiN thin films

U Oh, Jung Ho Je · Journal of Applied Physics · 1993 · 407 citations · Full text

Natural Sciences, Materials Science, Physics +15

Microstructure and physical properties of polycrystalline metastable Ti0.5Al0.5N alloys grown by d.c. magnetron sputter deposition

G. Håkansson, J.‐E. Sundgren, D.C. McIntyre et al. · Thin Solid Films · 1987 · 238 citations

Natural Sciences, Materials Engineering, Materials Science +16