Fabrication of submicron LiNbO3 transducers for microwave acoustic (bulk) delay lines

Abstract

The technology for fabrication of submicron bulk platelet transducers has been developed. Lithium niobate (LiNbO3) transducers with thicknesses as low as 0.25 μm have been achieved. This technology employs a novel bonding technique, the room-temperature vacuum bond, and a carefully controlled process of ion-beam milling. Bulk wave acoustic delay lines consisting of LiNbO3 transducers on spinel (MgAl2O4) substrate have yielded very wide-band and low-loss operation in S-, C-, and X-band frequencies.