Concepedia

Publication | Closed Access

Passivation of Cu via refractory metal nitridation in an ammonia ambient

DOI

35

Citations

23

References

1995

Year

Daniel Adams, T. L. Alford, N. David Theodore, Stephen W. Russell, R.L. Spreitzera, J. W. Mayer
Thin Solid Films

References

YearCitations

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