Concepedia

Combined electron and ion beam processes for microelectronics

Microelectronics Reliability · 1965 · 46 citations · 0 references

Concepts

EngineeringElectrical EngineeringPhysicsMicroelectronicsMicrofabricationSemiconductor DevicesAccelerator PhysicsElectron Beam PhysicsIntegrated Circuit DesignIon ImplantationIonization ProcessesNanoelectronicsElectron Beam AccelerationElectron Beam SourcesIon Beam Etching