Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications - Concepedia

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Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications

DOI Full Paper Access

61

Citations

5

References

1998

Year

L. Dellmann, S. Roth, C. Beuret, G.-A. Racine, H. Lorenz, M. Despont, Philippe Renaud, P. Vettiger, Ν. F. de Rooij

Sensors and Actuators A Physical

Materials ScienceEngineeringPiezoelectric Motor ApplicationsMicrofabricationPiezoelectric NanogeneratorsMechanical EngineeringMechanical SystemsFabrication ProcessElectronic-mechanical SystemPiezoelectric MaterialMicroactuatorPiezoelectricityHigh Aspect Ratio

References

	Year	Citations

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