Applied Physics A · 1983 · 48 citations · 7 references
Natural SciencesMaterials SciencePhysicsOpticsOptoelectronicsSemiconductor MaterialsCrystal GrowthEpitaxial GrowthLaser PhysicsSemiconductor LasersSilicon MaterialsSilicon PhotonicsCrystalline SiliconSingle-crystal GrowthSingle-crystal Silicon
7
Ar+ laser induced chemical vapor deposition of Si from SiH4
D. Bäuerle, Peter Irsigler, G. Leyendecker et al. · Applied Physics Letters · 1982 · 102 citations
Laser induced chemical vapor deposition of carbon
G. Leyendecker, D. Bäuerle, P. Geittner et al. · Applied Physics Letters · 1981 · 90 citations
Natural Sciences, Materials Engineering, Materials Science +17