The role of carrier gases in the epitaxial growth of β-SiC on Si by CVD

<i>The Properties of Gases and Liquids</i>

Robert C. Reid, T. K. Sherwood, Robert E. Street · Physics Today · 1959 · 14.2K citations

Natural Sciences, Chemistry, Physics +16

The properties of gases and liquids

Choice Reviews Online · 2001 · 13K citations

Natural Sciences, Chemistry, Physics +10

Production of large-area single-crystal wafers of cubic SiC for semiconductor devices

Shigehiro Nishino, J. A. Powell · Applied Physics Letters · 1983 · 926 citations

Engineering, Materials Engineering, Materials Science +17

Diffusion and heat exchange in chemical kinetics

Morton Bortner · Journal of the Franklin Institute · 1956 · 198 citations

Natural Sciences, Chemical Engineering, Physics +14

Growth and Characterization of Cubic SiC Single‐Crystal Films on Si

J. A. Powell, L. G. Matus, Maria A. Kuczmarski · Journal of The Electrochemical Society · 1987 · 184 citations

Natural Sciences, Materials Engineering, Materials Science +17